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BS EN 60204-33-2011 safety of machinery — electrical equipment of machinespart 33: requirements for semiconductor fabrication equipment

Standard Number:  BS EN 60204-33-2011
Title:  safety of machinery — electrical equipment of machinespart 33: requirements for semiconductor fabrication equipment
Language:  English
Replacing Standard:  07/30153021 DC

Publication Date:  2011/8/31
Execute Date:  2011/8/31
Adopted International Standard:  IEC 60034-11:2004, IEC 60038, IEC 60073:2002, IEC 60364-4-41:2005, IEC 60364-4-43:2008, IEC 60364-6:2006, IEC 60417-DB, IEC 60445:2006, IEC 60446:2007, IEC 60447:2004, IEC 60529:1989, IEC 60617-DB, IEC 60695-11-10:1999, IEC 60950-1:2005, IEC 61010-1:2001, IEC 61032:1997, IEC 61310, IEC 61310-1:2007, IEC 61508, IEC 61557-3:2007, IEC 61558-1:2005, IEC 61558-2-6:2009, IEC 61800-5-1:2007, IEC 62061:2005, ISO 12100-2:2003, ISO 13849, ISO 13849-1:1999, ISO 13851:2002, EN 60034-11:2004, EN 60073:2002, CENELEC HD 60364-4-41:2007, CENELEC HD 60364-4-41:2007/Corrigendum:2007, CENELEC HD 60364-4-43:2010, CENELEC HD 60364-6:2007, EN 60445:2007, EN 60446:2007, EN 60447:2004, EN 60529:1991, EN 60529:1991/Corrigendum:1993, EN 60695-11-10:1999, EN 60950-1:2006, EN 60950-1:2006/A11:2009, EN 61010-1:2001, EN 61010-1:2001/Corrigendum:2002, EN 61032:1998, EN 61310, EN 61310-1:2008, EN 61508, EN 61557-3:2007, EN 61558-1:2005, EN 61558-1:2005/Corrigendum:2006, EN 61558-2-6:2009, EN 61800-5-1:2007, EN 62061:2005, EN 62061:2005/Corrigendum:2010, EN ISO 12100-2:2003, EN ISO 13849, IEC 60034-1:2004, IEC 60050-191, IEC 60050-195, IEC 60050-441, IEC 60050-442, IEC 60050-826, IEC 60072, IEC 60204-1, IEC 60204-32, IEC 60309-1:1999, IEC 60364, IEC 60364-5-53:2001, IEC 60364-5-54:2002, IEC 60439-1:1999, IEC 60909, IEC 60947-2:2006, IEC 60947-3:2008, IEC 60947-5-1, IEC 60947-5-2, IEC 61558-2-16:2009, IEC/TR 61000-5-2, IEC 61000-6-1, IEC 61000-6-2, IEC 61000-6-3, IEC 61000-6-4, IEC 61010-1:2001, IEC 61082-1:2006, IEC 61084, IEC 61140:2001, IEC 61084, IEC 61310-3:2007, IEC 61326, IEC 61346, IEC 61439-1:2009, IEC 61496-1, IEC 61800-3, IEC 61984:2008, IEC 62046:2008, IEC/TR 62513, ISO 3864-1:2002, ISO 12100-1:2003, ISO 13850:2006, ISO 14122, CENELEC HD 516 S2, SEMI S1, EN 60034-1:2004, EN 60204-1, EN 60204-32, EN 60309-1:1999, CENELEC HD 60364, CENELEC HD 60364-5-54:2007, EN 60439-1:1999, EN 60909, EN 60947-2:2006, EN 60947-3:2009, EN 60947-5-1, EN 60947-5-2, EN 61000-6-1, EN 61000-6-2, EN 61000-6-3, EN 61000-6-4, EN 61010-1:2001, EN 61082-1:2006, EN 61140:2002, EN 61310-3:2008, EN 61326, EN 61346, EN 61439-1:2009, EN 61496-1, EN 61558-2-16:2009, EN 61800-3, EN 61984:2009, CLC/TS 62046:2008, EN ISO 13850:2008, EN ISO 14122, 2006/42/EC
Status:  Current
International Classification for Standards (ICS)ENVIRONMENT. HEALTH PROTECTION. SAFETY>>Safety of machinery
Publisher:  British Standards
Price:  
Number of Pages:130  

Preface:Electrical equipment, Electronic equipment and components, Electrical safety, Equipment safety, Machine tool components, Production equipment, Semiconductor technology, Semiconductors, Semiconductor devices, Electrical protection equipment, Control systems, Control equipment, Safety devices, Electric control equipment, Switchgear, Electric conductors, Electric cables, Electrical installations, Handbooks  
Description:This part of IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. NOTE 1 In this standard, the term electrical includes electrical, electronic, and programmable electronic matters (i.e. electrical equipment means electrical, electronic, and programmable electronic equipment). NOTE 2 In the context of this standard, the term person refers to any individual and includes those persons who are assigned and instructed by the user or his agent(s) in the installation, use, and care of the fabrication equipment in question. The electrical equipment covered by this standard commences at the point of connection of the supply to the electrical equipment (see 5.1), and includes proper instruction for its safe installation. NOTE 3 For the requirements for the electrical supply installation in buildings, see IEC 60364 series. This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed. NOTE 4 Electrical equipment within which derived voltages exceed these supply voltage limits is within the scope of this standard. Included are requirements for protective measures against electrical safety hazards as well as electrical interlock circuits that protect against non-electrical hazards. However, it does not cover all the requirements that are needed or required by other standards or regulations in order to safeguard persons from hazards other than electrical hazards (e.g. chemical hazards, mechanical hazards, radiation hazards). Each type of machine has unique requirements to be accommodated to provide adequate safety. Additional and special requirements can apply to the electrical equipment of fabrication equipment that: ? use, process, or produce potentially explosive material; ? are used in potentially explosive and/or flammable atmospheres; ? have special risks when producing or using certain materials; ? are hoisting machines (which are covered by IEC 60204-32). This standard does not include specifications for performance or functional characteristics of the fabrication equipment. This standard does not deal with the possible effects on human health that can result from emissions (for example EMFs, noise) from the fabrication equipment. This standard does not specify requirements for electromagnetic compatibility (EMC).  
Cross References:IEC 60034-11-2004, IEC 60038, IEC 60073-2002, IEC 60364-4-41-2005, IEC 60364-4-43-2008, IEC 60364-6-2006, IEC 60417-DB, IEC 60445-2006, IEC 60446-2007, IEC 60447-2004, IEC 60529-1989, IEC 60617-DB, IEC 60695-11-10-1999, IEC 60950-1-2005, IEC 61010-1-2001, IEC 61032-1997, IEC 61310, IEC 61310-1-2007, IEC 61508, IEC 61557-3-2007, IEC 61558-1-2005, IEC 61558-2-6-2009, IEC 61800-5-1-2007, IEC 62061-2005, ISO 12100-2-2003, ISO 13849, ISO 13849-1-1999, ISO 13851-2002, EN 60034-11-2004, EN 60073-2002, CENELEC HD 60364-4-41-2007, CENELEC HD 60364-4-41-2007/Corrigendum-2007, CENELEC HD 60364-4-43-2010, CENELEC HD 60364-6-2007, EN 60445-2007, EN 60446-2007, EN 60447-2004, EN 60529-1991, EN 60529-1991/Corrigendum-1993, EN 60695-11-10-1999, EN 60950-1-2006, EN 60950-1-2006/A11-2009, EN 61010-1-2001, EN 61010-1-2001/Corrigendum-2002, EN 61032-1998, EN 61310, EN 61310-1-2008, EN 61508, EN 61557-3-2007, EN 61558-1-2005, EN 61558-1-2005/Corrigendum-2006, EN 61558-2-6-2009, EN 61800-5-1-2007, EN 62061-2005, EN 62061-2005/Corrigendum-2010, EN ISO 12100-2-2003, EN ISO 13849, IEC 6003  
File Format:  PDF(Acrobat Reader) or Word version doc Document
File Size:  956KB
Tile in English:  safety of machinery — electrical equipment of machinespart 33: requirements for semiconductor fabrication equipment

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